Structure of Ultra-Thin Diamond-Like Carbon Films Grown with Filtered Cathodic Arc on Si(001)
نویسندگان
چکیده
منابع مشابه
Structure of ultra-thin diamond-like carbon films grown with filtered cathodic arc on Si(001).
The structure of 3 nm and 15 nm diamond-like carbon films, grown on Si(001) by filtered cathodic arc, was studied by angle-resolved X-ray photoelectron spectroscopy (ARXPS) and transmission electron microscopy (TEM). The ARXPS data was deconvolved by employing simultaneous-fitting, which allowed for a clear deconvolution of the Si 2p and C 1s spectra into their different chemical contributions....
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ژورنال
عنوان ژورنال: Analytical Sciences
سال: 2010
ISSN: 0910-6340,1348-2246
DOI: 10.2116/analsci.26.267